Inertial MEMS example

Example of an inertial MEMS type device showing the DRIE etched device layer of a SOI wafer and release holes to etch the buried oxide.

Inertial MEMS typically comprise a proof mass made out of the device layer of a SOI wafer, such as in a MEMS accelerometer or a MEMS gyroscope. Inertial MEMS find their application in cell phones, cars, GPS and other consumer applications, and are produced in millions. They are often available as off the shelf products.

Customers of LioniX International use their inertial MEMS typically for niche applications which cannot be obtained by the standard processes offered by other MEMS players. Other customers use inertial MEMS produced by LioniX International for prototyping.

Based on the same fabrication technology as used for accelerometers and gyroscopes LioniX International also build MEMS mirrors for various applications.