Inertial MEMS example

Example of an inertial MEMS type device showing the DRIE etched device layer of a SOI wafer and release holes to etch the buried oxide.

The type of device comprising a proof mass made out of the device layer of a SOI wafer, such as for example in accelerometers and gyroscopes, is generally referred to as inertial MEMS. Inertial MEMS find their application in cell phones, cars, GPS and other consumer applications, and are produced in millions. They are often available as off the shelf products.

Customers of LioniX International use their inertial MEMS typically for niche applications which cannot be obtained by the standard processes offered by other MEMS players. Other customers use  inertial MEMS produced by LioniX International for prototyping.