The Ion Sensitive Field Effect Transistor (ISFET) is a solid state, potentiometric sensor capable of measuring pH in the range from pH 1 to pH 14 with a linear response.


Various customers need customized ISFETs with high sensitivity, low drift and low light sensitivity.


We developed a solution based on ion implantation, gate oxidation, diffusion, and a tantalumoxide (Ta2O5) gate material.

More information on this poster, which was published on the 3rd Conference on MicroFluidic Handling Systems, 4-6 October 2017, Enschede, the Netherlands.