Application

The FEI NanoEx-i/v is a specimen heating and biasing holder for in situ S/TEM imaging and elemental analysis at elevated temperatures.​

Request

The customer needs micron sized, 20 nanometer thin membranes which can be heated uniformly to temperatures up to 1200 C.

Solution

We developed and are producing a solution based on LPCVD silicon nitride membranes and High Temperature Heaters capped also by LPCVD silicon nitride.