Platform Technologies

Using the available equipment and our year of expertise we have developed platform technologies that are used as the building blocks for our customized MEMS. Below you find and overview of our most use platform technologies:


  • Bosch and ICP
  • Through wafer etching
  • DRIE on Silicon, Fused Silica and SOI wafers
  • High Aspect Ratio etching
  • Multilevel etching using buried mask technology
  • Etchstop on SiO2

Trench fill process

Inertial MEMS


  • DRIE through device layer
  • Release etch (BOx layer)
  • Bonding and Etchback
  • Trenchfill process

MEMS can be very vulnerable if exposed to real life circumstances. To protect MEMS, and let them work in a controlled environment, a capping wafer is bonded before dicing and packaging. The technology is also referred to as 3D packaging.


  • Bonding methods: direct, anodic, thermocompression, eutectic, epoxy and BPSG
  • Vacuum bonding
  • Hermetic bonding
  • Cavity bonding
  • Aligned bonding
  • CMP

LioniX International produces custom designed ISFETs (ion sensitive field effect transistors) with a standard process based on ion implantation and a Ta2O5 gate dielectric. These ISFETs have a very high, almost Nernstian response of 58 mV/pH, and very low drift. They can be equipped with a protection electrode for ESD and a temperature diode.

TriPleX is LioniX Internationals platform for fabrication of LPCVD Silicon Nitride based PICs (Photonic Integrated Circuits). Our PICs are used for datacom/telecom applications and for optical sensors in life sciences. LioniX is a leading player in PIC systems including assembly, control electronics and integration of light sources and detectors.

Optofluidics, the combination of integrated waveguide based optical sensors and microfluidics, is one of the disciplines in which LioniX International distinguishes itself from other players in the field. Both expertises have deep roots in the company.

Optofluidic chips and systems find their application in Life Sciences. They are used for confocal microscopy, flow cytometry, Optical Coherence Tomography (OCT), endoscopy, spectroscopy, optical biosensors, food sorting, flowcytometry and molecular diagnostics.