Silicon on insulator wafers for advanced MEMS devices

Silicon on insulator wafers (SOI wafers) offer excellent performance for advanced MEMS devices. SOI is a three-layered silicon-insulator-silicon substrate. This structure enables superior electrical and mechanical performance compared to silicon wafers.

scanning electron microscope image (SEM) image of a silicon on insulator SOI MEMS

Silicon on Insulator wafer capabilities

SOI wafers are compatible with most of our clean room manufacturing processes. Specific capabilities for SOI wafer processing include:

  • DRIE through device layer
  • Release etch (BOX layer)
  • Bonding and handle etchback
  • Trench fill process

SOI wafer specifications

We offer custom layer thickness and BOX thickness tailored to your application by working with specialist suppliers of silicon on insulator wafers.